AccuThermo AW 820V Vacuum RTP with top and bottom lamp heating
The AccuThermo AW820V is a stand alone Vacuum RTP (Rapid Thermal Processing) system, which uses
high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures ... Typically, N2, O2), Ar, He, forming gas, NH3, N2O2 are used
. ... Key features: Vacuum capability RTP/RTA/RTO/RTN system with Top and bottom
High-intensity visible radiation Tungsten halogen lamp heating for fast ...
11/22/2015 ~ Morgan Hill, California