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 Industrial & Machinery. Process Equipment.
 

Hitachi FE-SEM model S-4160

 
 

Condition:

- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!

6 inch full wafer system for in-process inspection and metrology of photoresist, e-beam resist, and nanolithographic structures: Semi-clean contamination level, No Au or Nobel metals allowed. Field emission gun with resolution to ~35 angstoms typical. On-board CD measurement and metrology functions. EDX Noran Instruments X-Ray Microanalysis system is controlled by a high-performance workstation with easy-to-use window manager. Image analysis available in a similar windows-based interface. The system is used with electron microscopes and x-ray detectors for a variety of applications, including the study of Semiconductors, Geological and metallurgical samples, biological specimens. Hardware components include monitor, mouse and keyboard, chassis, active scan interface control box, central processing unit. The Voyager system can be connected to a variety of SEMs, TEMs, and STEMs. Software: Solaris UNIX operating system, Desktop tools, Tools for EDS, Imaging, & Automation

SEM:
Zeiss/Leo 435VP - W SEM, variable pressure
Zeiss/Leo DSM982 FE SEM
Hitachi S-4500 - FE SEM, Type I and Type II
Hitachi S-4700 - FE SEM, Type II
Hitachi S-4800 - FE SEM, Type II

CD/SEM:
Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

FIB:
FEI/Micrion M9100 Workstation, Gas box optional
FEI/Micrion M9500 Workstation, Gas box optional
Seiko 8300 FIB
Seiko 8100 FIB

Please contact us for more information by sales@allwin21.com­


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