The Effective Free Classifieds

Condition:

- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!

Hitachi S-8820 CD SEM

· Model: S-8820 or S-8620

· Vintage: 1996

· Wafer Size: 150 mm

· Throughput: 20 wafers per hour 5 pt meas. per wafer continuous

· SECS/GEM Communication Interface

· Schottky Electron Gun

· Single se detector

· Accelerating voltage, 500V to 1300V, 10V steps

· Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V

· 3 Stage Electromagnetic Lens System

· Objective Lens: 4 opening click stop, selectable/adjustabl­e externally

· 2-Stage Deflection Scan Coil

· Astigmatism correction via an 8-pole electromagnetic coil

· SEM Magnification = 1,000x to 150,000x

· Wafer imaging ability: Entire surface of 8” wafer

· Depth of focus: >= 1.0mm at 80,000x magnification

· Resolution: 5 nm at 800V on CRT

· Optical Microscope: Monochrome CCD camera, Fixed Mag of 110x

· Workstation, HP 715-64 computer or later model

· Multipoint Measurement Function

· Edge Roughness Function

· Contact Hole Measurement Function

· Automated Image Archiving Function

· Foreline pump (Rotary) x2

· Turbo pump X2

· Ion Pump x3

· Operating Voltage 100 V AC, 50 Amp.

Please contact us for more information by sales@allwin21.com­

SEM:
Zeiss/Leo 435VP - W SEM, variable pressure
Zeiss/Leo DSM982 FE SEM
Hitachi S-4500 - FE SEM, Type I and Type II
Hitachi S-4700 - FE SEM, Type II
Hitachi S-4800 - FE SEM, Type II

CD/SEM:
Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

FIB:
FEI/Micrion M9100 Workstation, Gas box optional
FEI/Micrion M9500 Workstation, Gas box optional
Seiko 8300 FIB
Seiko 8100 FIB

E-mail