- Condition: Refurbished - Brand: Hitachi - Model: Hitachi S8840
Condition:
- Fully Refurbished by many years experienced technicians. - Guaranteed to meet or exceed OEM specifications - 3 MONTH warranty and specifications guarantee. - Installation, training, service, and support available worldwide!
Hitachi S8840 SEM Consisting of:
- Manufacturer: Hitachi - Model: S8840 - Wafer Size: 200mm - Hitachi S8840 CD SEM Mainframe - CD measuring size: 130-160nm, consistently - Version 11.7 S/W or newer - SECS/GEM Communication Interface - Additional hard disk drive (>1GB) - VRT board w/ 8 mb of memory - DSP compatible conductive wafer holder - Hitachi Hi Tech Electron Gun - Accelerating voltage, 500V to 1300V, 10V steps - Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V - 3 Stage Electromagnetic Lens System - Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum system - 2-Stage Deflection Scan Coil - Astigmatism correction via an 8-pole electromagnetic coil - Magnification = 1000x to >150000x - Field control method ; Continuously on for sample decharging, at all voltages - Wafer imaging ability; Entire surface of 8"" wafer - Depth of focus: >= 1.0mm at 80000x magnification - Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding voltage), < 6nm at 1000V - 1300V -Retarding voltage: Optional at <= 800V for improved resolution - Hitachi Probe Tip -Optical Microscope System: Image is Monochrome, using CCD camera, Magnification is 110x, Wafer imaging X & Y coverage from 5–195mm , notch down - Dual XY Hitachi Microscale - Workstation, HP B180L - Error Tracking Software - Multipoint Measurement Function - Edge Roughness Function - Contact Hole Measurement Function - Automated Image Archiving Function - Ergonomic Cassette Flipper Option (2 flippers - one per load port) - Operations Manual and Documentation
Please contact us for more information by sales@allwin21.com
SEM: Zeiss/Leo 435VP - W SEM, variable pressure Zeiss/Leo DSM982 FE SEM Hitachi S-4500 - FE SEM, Type I and Type II Hitachi S-4700 - FE SEM, Type II Hitachi S-4800 - FE SEM, Type II
CD/SEM: Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers Hitachi S-9300 for 6", 8" or 12 " Silicon wafers
FIB: FEI/Micrion M9100 Workstation, Gas box optional FEI/Micrion M9500 Workstation, Gas box optional Seiko 8300 FIB Seiko 8100 FIB Peter (Santa Clara, CA) 408-988-5188 Visit website
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