Classifieds

Fully Refurbished and upgraded BRANSON/IPC - 3000
Low Temperature Plasma Asher.

Quartz reaction chamber(Consumable­ parts).

1000W 13.56 MHz ENI RF generator(Consumable­ parts)

4” quartz boat(Consumable parts)—It can also be 6”.

Single gas line with One Used MFC (Consumable parts)

Computer with touch screen.

Monitor with keyboard, mouse.

AW-2000 software with new controller for Branson/IPC 3000

After upgraded with PC control, it can do different process control timers, gas flow and power settings
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The Branson IPC 3000 is a barrel plasma etcher that uses oxygen to etch organic films and residues such as photoresist in a process commonly referred to as "de-scumming." During a normal run for the Branson Barrel Etcher, the chamber is evacuated to under 0.5 torr pressure. A regulated flow of oxygen gas is introduced into the chamber and RF energy is applied to the chamber coils, which creates an oxygen plasma which does the etching. The oxygen ions in the plasma react with organics, such as photoresist, oxidizing or descumming the compounds off of the surface. The oxidized organics are pumped out of the Branson Barrel Etcher's chamber as exhaust gas.
New upgraded Branson 3000 Asher system is getting rid of the old logic relays controllers to use new Pentium PC computer with DOS-WINDOW graphics GUI.

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